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Browsing by Author "Optical Micro- and Nanometrology in Microsystems Technology II (2008:Strasbourg)"

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Browsing by Author "Optical Micro- and Nanometrology in Microsystems Technology II (2008:Strasbourg)"

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Date Title Author Type
2008
Characterization of MEMS cantilevers using lensless digital holographic microscope.
Andrei, Alexandru.; Gorecki, Cristophe.; Nieradko, Lukasz.; Singh, Vijay Raj.; Anand, Asundi.
Conference Paper