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Browsing School of Materials Science and Engineering (MSE) by Author "Chan, L."

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Browsing School of Materials Science and Engineering (MSE) by Author "Chan, L."

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Date Title Author Type
2002
Effect of ion implantation on layer inversion of Ni silicided poly-Si.
Lee, Pooi See.; Pey, Kin Leong.; Mangelinck, D.; Ding, J.; Chi, Dong Zhi.; Osipowicz, T.; Dai, J. Y.; Chan, L.
Journal Article
2004
Effect of processing parameters on electroless Cu seed layer properties.
Ee, Y. C.; Chen, Z.; Chan, L.; See, Alex K. H.; Law, S. B.; Tee, K. C.; Zeng, K. Y.; Shen, L.
Journal Article
2004
Electroless copper deposition as a seed layer on TiSiN barrier.
Ee, Y. C.; Chen, Z.; Xu, S.; Chan, L.; See, K. H.; Law, S. B.
Journal Article
2005
Formation of Ti-Si-N film using low frequency, high density inductively coupled plasma process.
Ee, Y. C.; Chen, Z.; Chan, L.; See, K. H.; Law, S. B.; Xu, S.; Tsakadze, Z. L.; Rutkevych, P. P.; Zeng, K. Y.; Shen, L.
Journal Article
2000
Improved NiSi salicide process using presilicide N2+ implant for MOSFETs.
Lee, Pooi See.; Pey, Kin Leong.; Mangelinck, D.; Ding, J.; Wee, A. T. S.; Chan, L.
Journal Article
2009
Lanthanide-based graded barrier structure for enhanced nanocrystal memory properties.
Chan, M. Y.; Chan, T. K.; Osipowicz, T.; Chan, L.; Lee, Pooi See.
Journal Article
2001
New salicidation technology with Ni(Pt) alloy for MOSFETs.
Lee, Pooi See.; Pey, Kin Leong.; Mangelinck, D.; Ding, J.; Chi, Dong Zhi.; Chan, L.
Journal Article
2002
Phase and layer stability of Ni- and Ni(Pt)-silicides on narrow poly-Si lines.
Lee, Pooi See.; Pey, Kin Leong.; Mangelinck, D.; Ding, J.; Chi, Dong Zhi.; Dai, J. Y.; Chan, L.
Journal Article
2008
Plasmon-enhanced polarized Raman spectroscopy for sensitive surface characterization.
Kasim, J.; Tee, X. Y.; You, Y. M.; Ni, Z. H.; Setiawan, Y.; Lee, Pooi See.; Chan, L.; Shen, Z. X.
Journal Article