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Title:
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Charge collection from within a collecting junction well.
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Author:
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Kurniawan, Oka.; Ong, Vincent K. S.
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Copyright year:
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2008 |
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Abstract:
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This paper provides the analytical equation for the charge collection from a collecting region with a finite dimension. Electron-beam-induced current has widely been used for semiconductor characterization. The availability of analytical expressions would further enhance the study and development of various measurement techniques. Nevertheless, most devices are fabricated with junctions that have finite dimensions, which are usually either L shaped or U shaped. For these cases, the analytical expressions are lacking. This paper provides the derivation of the electric current profile when an electron beam scans from within the collecting region for these two cases. The computation was
verified with a semiconductor device simulation program on a
computer and was found to be in good agreement. This paper then
gives a discussion on the effects of certain parameters such as the
junction depth and junction width, the diffusion length, and the
depth of the generation volume. |
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Subject:
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DRNTU::Engineering::Electrical and electronic engineering. |
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Type:
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Journal Article |
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Series/ Journal Title:
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IEEE transactions on electron devices |
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School:
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School of Electrical and Electronic Engineering |
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Rights:
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© 2008 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder. http://www.ieee.org/portal/site This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder. |
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Version:
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Published version |
