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Computation of charge collection probability for any collecting junction shape.

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Computation of charge collection probability for any collecting junction shape.

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Title: Computation of charge collection probability for any collecting junction shape.
Author: Kurniawan, Oka.; Ong, Vincent K. S.; Tan, Chee Chin.; Li, Erping.
Copyright year: 2009
Abstract: Electron-beam-induced current (EBIC) of the scanning electron microscope (SEM) has been widely used for semiconductor devices and materials characterizations. The charge collection probability within a collecting junction plays an important role in determining the EBIC current. The conventional approach starts by solving the continuity equation to obtain the charge carrier density and then the analytical expression for the charge collection probability. Knowing the analytical expression of the charge collection probability &