mirage

Extraction of diffusion length using junction-less EBIC.

DSpace/Manakin Repository

 

Search DR-NTU


Advanced Search Subject Search

Browse

My Account

Extraction of diffusion length using junction-less EBIC.

Show full item record

Title: Extraction of diffusion length using junction-less EBIC.
Author: Ong, Vincent K. S.; Tan, Chee Chin.; Radhakrishnan, K.
Copyright year: 2009
Abstract: The electron-beam-induced current (EBIC) mode of the scanning electron microscope (SEM) has been widely used in semiconductor materials and devices characterization in particular the extraction of minority carrier properties. The conventional approaches require the sample to have a built-in electric field created by the charge collecting junction that separates the majority carriers from the minority carriers and drives the induced current into the external circuitry for detection. As a result, these conventional approaches are not applicable for samples without junctions, i.e. bare substrates. This paper discusses the feasibility of extracting the minority carrier diffusion length in junction-less sample using the junction-less EBIC technique with the use of a two-point probe method. A 2-D device simulator is used to verify this technique and it is found the accuracy depends on the location of the origin.
Subject: DRNTU::Engineering::Electrical and electronic engineering::Electronic systems::Signal processing.
Type: Conference Paper
Conference name: IEEE International Symposium on Integrated Circuits (12th : 2009 : Singapore)
School: School of Electrical and Electronic Engineering
Rights: © 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder. http://www.ieee.org/portal/site This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.
Version: Published version

Files in this item

Files Size Format View
Extraction of D ... ing Junction-less EBIC.pdf 1.422Mb PDF View/Open
   

SFX Query

- Get published version (via NTU subscribed resources)
   

This item appears in the following Collection(s)

Show full item record

Statistics

Total views

All Items Views
Extraction of diffusion length using junction-less EBIC. 472

Total downloads

All Bitstreams Views
Extraction of Diffusion Length Using Junction-less EBIC.pdf 207

Top country downloads

Country Code Views
United States of America 75
China 38
Singapore 28
Russian Federation 9
Taiwan 7

Top city downloads

city Views
Mountain View 53
Singapore 28
Beijing 18
Lipetsk 4
Shanghai 3

Downloads / month

  2014-06 2014-07 2014-08 total
Extraction of Diffusion Length Using Junction-less EBIC.pdf 0 0 8 8