Please use this identifier to cite or link to this item:
https://hdl.handle.net/10356/91153
Title: | Charging effect of Al2O3 thin films containing Al nanocrystals | Authors: | Chen, X. B. Liu, Yang Chen, Tupei Zhu, Wei Yang, Ming Cen, Zhan Hong Wong, Jen It Li, Yibin Zhang, Sam Fung, Stevenson Hon Yuen |
Keywords: | DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics | Issue Date: | 2008 | Source: | Liu, Y., Chen, T., Zhu, W., Yang, M., Cen, Z. H., Wong, J. I., et al. (2008). Charging effect of Al2O3 thin films containing Al nanocrystals. Applied Physics Letters, 93, 1-3. | Series/Report no.: | Applied physics letters | Abstract: | In this work, Al2O3 thin film containing Al nanocrystals (nc-Al) is deposited on Si substrate by radio frequency sputtering to form a metal-insulator-semiconductor structure. Both electron and hole trapping in nc-Al are observed. The charge storage ability of the nc-Al/Al2O3 thin films provides the possibility of memory applications. Charging in the nc-Al also leads to a change in the dc resistance of the thin films, namely, the electron trapping in the nc-Al leads to an increase in the resistance, whereas the resistance is reduced if there is hole trapping in the nc-Al. | URI: | https://hdl.handle.net/10356/91153 http://hdl.handle.net/10220/6351 |
ISSN: | 0003-6951 | DOI: | 10.1063/1.2994695 | Schools: | School of Electrical and Electronic Engineering | Rights: | Applied Physics Letters © copyright 2008 American Institute of Physics. The journal's website is located at http://apl.aip.org/applab/v93/i14/p142106_s1?isAuthorized=no | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
Appears in Collections: | EEE Journal Articles |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
Charging effect of Al2O3 thin films containing Al nanocrystals.pdf | 240.41 kB | Adobe PDF | View/Open |
SCOPUSTM
Citations
20
19
Updated on Mar 27, 2024
Web of ScienceTM
Citations
20
15
Updated on Oct 27, 2023
Page view(s) 5
1,092
Updated on Mar 27, 2024
Download(s) 10
423
Updated on Mar 27, 2024
Google ScholarTM
Check
Altmetric
Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.