mirage

Dielectric functions of densely stacked Si nanocrystal layer embedded in SiO2 thin films

DSpace/Manakin Repository

 

Search DR-NTU


Advanced Search Subject Search

Browse

My Account

Dielectric functions of densely stacked Si nanocrystal layer embedded in SiO2 thin films

Show full item record

Title: Dielectric functions of densely stacked Si nanocrystal layer embedded in SiO2 thin films
Author: Ding, Liang; Chen, Tupei; Wong, Jen It; Yang, Ming; Liu, Yang; Ng, Chi Yung; Liu, Yu Chan; Tung, Chih Hang; Trigg, Alastair David; Fung, Stevenson Hon Yuen
Copyright year: 2006
Abstract: A densely stacked silicon nanocrystal layer embedded in a SiO2 thin film is synthesized with Si ion implantation. The dielectric functions of the nanocrystal layer are determined with spectroscopic ellipsometry. The dielectric functions show a significant suppression as compared to that of bulk crystalline Si. Thermal annealing leads to an evolution of the dielectric functions from the amorphous towards crystalline state. For an insufficient annealing, the dielectric functions present a single broad peak, being similar to that of amorphous Si. However, a sufficient annealing leads to the emergence of the two-peak structure which is similar to that of bulk crystalline Si. In addition, the dielectric functions increase with annealing with a trend towards bulk Si.
Subject: DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics.
Type: Journal Article
Series/ Journal Title: Applied physics letters
Related Organization: Singapore Institute of Manufacturing TechnologyInstitute of Microelectronics
Rights: Applied Physics Letters © copyright 2006 American Institute of Physics. The journal's website is located at http://apl.aip.org/applab/v89/i25/p251910_s1?isAuthorized=no
Version: Published version

Files in this item

Files Size Format View
Dielectric func ... ed in SiO 2 thin films.pdf 370.9Kb PDF View/Open
   

DOI Query

- Get published version (via Digital Object Identifier)
   

This item appears in the following Collection(s)

Show full item record

Statistics

Total views

All Items Views
Dielectric functions of densely stacked Si nanocrystal layer embedded in SiO2 thin films 288

Total downloads

All Bitstreams Views
Dielectric functions of densely stacked Si nanocrystal layer embedded in SiO 2 thin films.pdf 136

Top country downloads

Country Code Views
United States of America 44
China 31
Singapore 28
Japan 5
Russian Federation 5

Top city downloads

city Views
Mountain View 32
Singapore 28
Beijing 19
Dnepropetrovsk 2
Jacksonville 2