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Title:
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Charging effect on electrical characteristics of MOS structures with Si nanocrystal distribution in gate oxide.
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Author:
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Li, S.; Zhao, P.; Liu, Yang.; Chen, Tupei.; Ng, Chi Yung.; Tse, Man Siu.; Fung, Stevenson Hon Yuen.; Liu, Yu Chan.
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Copyright year:
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2004 |
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Abstract:
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We report a study of influence of charging and discharging in Si nanocrystals (nc-Si), which are embedded throughout the gate oxide in metal-oxide-semiconductor (MOS) structures, on the current voltage and capacitance-voltage characteristics of the MOS structures. Very large current and capacitance are observed for the as-fabricated structures. However, charge trapping in the nanocrystals can reduce both the current and the capacitance dramatically. The trapped charges can also tunnel out from the nc-Si, leading to the recovery of both the current and the capacitance. The current reduction is attributed to the breaking of the nc-Si the change of the nc-Si capacitance as a result of the charge trapping. |
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Subject:
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DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics. |
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Type:
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Journal Article |
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Series/ Journal Title:
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Electrochemical and solid state letters |
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School:
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School of Electrical and Electronic Engineering |
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Related Organization:
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Singapore Institute of Manufacturing Technology |
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Rights:
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Electrochemical and Solid State Letters © copyright 2004 Electrochemical Society. The journal's website is located at http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=ESLEF600000700000700G134000001&idtype=cvips&gifs=yes&ref=no |
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Version:
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Published version |
