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Vibration measurement of a micro-structure by digital holographic microscopy

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Vibration measurement of a micro-structure by digital holographic microscopy

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dc.contributor.author Shi, Hongjian
dc.contributor.author Fu, Yu
dc.contributor.author Quan, Chenggen
dc.contributor.author Tay, Cho Jui
dc.contributor.author He, Xiaoling
dc.date.accessioned 2011-01-25T03:40:46Z
dc.date.available 2011-01-25T03:40:46Z
dc.date.copyright 2009
dc.date.issued 2011-01-25T03:40:46Z
dc.identifier.citation Shi, H., Fu, Y., Quan, C., Tay, C. J., & He, X. (2009). Vibration measurement of a micro-structure by digital holographic microscopy. Measurement Science and Technology, 20(6).
dc.identifier.issn 0957-0233
dc.identifier.uri http://hdl.handle.net/10220/6700
dc.description.abstract A method for the vibration measurement of a micro-electro-mechanical system (MEMS) structure based on digital holographic microscopy (DHM) is presented. A sequence of digital holograms of a vibrating micro-beam excited by varying voltage is captured by a high-speed CCD camera. The phase changes of the object at different instants are obtained by digital reconstruction. The displacement, velocity and acceleration are evaluated by both spatial and temporal Fourier and windowed Fourier analyses. The results show that digital holographic microscopy with Fourier analyses is an effective method for evaluating the dynamic characteristics of a MEMS component.
dc.format.extent 21 p.
dc.language.iso en
dc.relation.ispartofseries Measurement science and technology
dc.rights This is the author created version of a work that has been peer reviewed and accepted for publication by Measurement Science & Technology, IOP Publishing Ltd. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [DOI:http://dx.doi.org/10.1088/0957-0233/20/6/065301].
dc.subject DRNTU::Science::Physics::Optics and light.
dc.title Vibration measurement of a micro-structure by digital holographic microscopy
dc.type Journal Article
dc.contributor.research Temasek Laboratories
dc.identifier.doi http://dx.doi.org/10.1088/0957-0233/20/6/065301
dc.description.version Accepted version

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