In-line digital holography for dynamic metrology of MEMS

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In-line digital holography for dynamic metrology of MEMS

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dc.contributor.author Singh, Vijay Raj
dc.contributor.author Anand, Asundi
dc.date.accessioned 2011-03-08T08:27:29Z
dc.date.available 2011-03-08T08:27:29Z
dc.date.copyright 2009
dc.date.issued 2011-03-08T08:27:29Z
dc.identifier.citation Singh, V. R., & Anand, A. (2009). In-line digital holography for dynamic metrology of MEMS. Chinese Optics Letters, 7(12), 1117-1122.
dc.identifier.issn 1671-7694
dc.identifier.uri http://hdl.handle.net/10220/6758
dc.description.abstract In-line digital holography helps to relax the spatial resolution requirement on charge-coupled device sensors for digital recording of holograms and to utilize the full sensing area for image reconstruction which provides larger field of view and better imaging resolution. In this letter, a lensless in-line digital holographic microscopy is presented for dynamic metrology of micro-electro-mechanical systems devices. The methodologies of interferometry and time-averaged in-line digital holography are presented for dynamic measurements, which are also useful for simultaneous suppression of in-line waves from real image wave. The experimental results are presented for dynamic thermal characterization of microheater and vibration analysis of cantilevers.
dc.format.extent 6 p.
dc.language.iso en
dc.relation.ispartofseries Chinese optics letters
dc.subject DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics.
dc.title In-line digital holography for dynamic metrology of MEMS
dc.type Journal Article
dc.contributor.school School of Mechanical and Aerospace Engineering
dc.identifier.doi http://dx.doi.org/10.3788/COL20090712.1117
dc.description.version Published version
dc.identifier.rims 143338

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