mirage

A comparative study on the dielectric functions of isolated Si nanocrystals and densely-stacked Si nanocrystal layer embedded in SiO2 synthesized with Si ion implantation

DSpace/Manakin Repository

 

Search DR-NTU


Advanced Search Subject Search

Browse

My Account

A comparative study on the dielectric functions of isolated Si nanocrystals and densely-stacked Si nanocrystal layer embedded in SiO2 synthesized with Si ion implantation

Show simple item record

dc.contributor.author Ding, Liang
dc.contributor.author Chen, Tupei
dc.contributor.author Liu, Yang
dc.contributor.author Liu, Yu Chan
dc.date.accessioned 2011-07-28T00:55:38Z
dc.date.available 2011-07-28T00:55:38Z
dc.date.copyright 2008
dc.date.issued 2011-07-28
dc.identifier.citation Ding, L., Chen, T., Liu, Y., & Liu, Y. C. (2008). A comparative study on the dielectric functions of isolated Si nanocrystals and densely-stacked Si nanocrystal layer embedded in SiO2 synthesized with Si ion implantation. Silicon photonics III.
dc.identifier.uri http://hdl.handle.net/10220/6938
dc.description.abstract Both isolated Si nanocrystals (nc-Si) dispersedly distributed in a SiO2 matrix and densely stacked nc-Si layers embedded in SiO2 have been synthesized with the ion implantation technique followed by high temperature annealing. The dielectric functions of the isolated nc-Si and densely-stacked nc-Si layer embedded in SiO2 have been determined with spectroscopic ellipsometry (SE) in the photon energy range of 1.1-5 eV. The dielectric functions of these two different Si nanostructures were successfully extracted from the SE fitting based on a multi-layer fitting model that takes into account the distribution of nc-Si in SiO2 and a five phase model (i.e., air/SiO2 layer/densely-stacked nc-Si layer/SiO2 layer/Si), respectively. The dielectric spectra of isolated nc-Si distributed in SiO2 present a two-peak structure, while the dielectric spectra of densely-stacked nc-Si layer show a single broad peak, being similar to that of amorphous Si. The dielectric functions of these two Si nanostructures both show significant suppressions as compared with bulk crystalline Si. However, it has been observed that the densely stacked nc-Si layer exhibits a more significant suppression in the dielectric spectra than the isolated nc-Si dispersedly embedded in SiO2. This is probably related to the two factors: (i) the nc-Si size (~3 nm) of the densely stacked nc-Si layer is smaller than that (~4.5 nm) of the isolated nc-Si embedded in SiO2 matrix, and (ii) the densely stacked nc-Si layer has an amorphous phase.
dc.format.extent 6 p.
dc.language.iso en
dc.rights © 2008 SPIE--The International Society for Optical Engineering. This paper was published in Proc. SPIE 6898 and is made available as an electronic reprint (preprint) with permission of SPIE--The International Society for Optical Engineering. The paper can be found at the following official DOI: http://dx.doi.org/10.1117/12.762600.  One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.
dc.subject DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
dc.title A comparative study on the dielectric functions of isolated Si nanocrystals and densely-stacked Si nanocrystal layer embedded in SiO2 synthesized with Si ion implantation
dc.type Conference Paper
dc.contributor.conference Silicon photonics III
dc.contributor.school School of Electrical and Electronic Engineering
dc.identifier.doi http://dx.doi.org/10.1117/12.762600
dc.description.version Published version
dc.contributor.organization Singapore Institute of Manufacturing Technology

Files in this item

Files Size Format View
A comparative s ... th Si ion implantation.pdf 568.5Kb PDF View/Open

This item appears in the following Collection(s)

Show simple item record

Statistics

Total views

All Items Views
A comparative study on the dielectric functions of isolated Si nanocrystals and densely-stacked Si nanocrystal layer embedded in SiO2 synthesized with Si ion implantation 554

Total downloads

All Bitstreams Views
A comparative study on the dielectric functions of isolated Si nanocrystals and densely stacked Si nanocrystal layer embedded in SiO2 synthesized with Si ion implantation.pdf 139

Top country downloads

Country Code Views
United States of America 53
China 29
Singapore 28
United Kingdom 5
India 3

Top city downloads

city Views
Mountain View 40
Singapore 28
Beijing 20
Southampton 4
Bangkok 2