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Dynamic characterization of MEMS diaphragm using time averaged in-line digital holography

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Dynamic characterization of MEMS diaphragm using time averaged in-line digital holography

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dc.contributor.author Singh, Vijay Raj
dc.contributor.author Miao, Jianmin
dc.contributor.author Wang, Zhihong
dc.contributor.author Hegde, Gopalkrishna M.
dc.contributor.author Anand, Asundi
dc.date.accessioned 2011-09-06T03:21:52Z
dc.date.available 2011-09-06T03:21:52Z
dc.date.copyright 2007
dc.date.issued 2011-09-06
dc.identifier.citation Singh, V. R., Miao, J., Wang, Z., Hegde, G. M., & Asundi, A. (2007). Dynamic characterization of MEMS diaphragm using time averaged in-line digital holography. Optics communications, 280(2), 285-290.
dc.identifier.issn 0030-4018
dc.identifier.uri http://hdl.handle.net/10220/7003
dc.description.abstract In this paper dynamic characterization of a MEMS diaphragm is investigated using lens-less time averaged in-line digital holography. The analysis and capability of the numerically reconstructed amplitude and phase information from in-line time averaged holograms as applied to MEMS vibration are presented. Particularly the effect of mean static state on the phase in time averaged digital holography is explored. A novel double exposure method is also demonstrated using a diverging object wave suitable for dynamic characterization of small size objects. A phase jump in the static deformation fringes in the vibrating regions is observed and described and can be used for precise analysis of vibration mode shape under simultaneous presence of mean static deformation. A simple and robust tool for dynamic optical metrology of MEMS devices and micro-objects using time averaged in-line digital holography is thus proposed.
dc.format.extent 6 p.
dc.language.iso en
dc.relation.ispartofseries Optics communications
dc.rights © 2007 Elsevier. This is the author created version of a work that has been peer reviewed and accepted for publication by Optics Communications, Elsevier. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [DOI: http://dx.doi.org/10.1016/j.optcom.2007.08.030 ]
dc.subject DRNTU::Science::Physics::Optics and light.
dc.title Dynamic characterization of MEMS diaphragm using time averaged in-line digital holography
dc.type Journal Article
dc.contributor.school School of Mechanical and Aerospace Engineering
dc.identifier.doi http://dx.doi.org/10.1016/j.optcom.2007.08.030
dc.description.version Accepted version
dc.identifier.rims 143340

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