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Digital holography for MEMS application

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Digital holography for MEMS application

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Title: Digital holography for MEMS application
Author: Anand, Asundi; Singh, Vijay Raj
Copyright year: 2009
Abstract: Studies on digital holographic microscopy for full field high resolution 3-D profiling of MEMS and micro-devices are presented. Applications for thin film thickness measurement and studies on a MEMS accelerometer are presented.
Subject: DRNTU::Science::Physics::Optics and light.
Type: Conference Paper
Conference name: Digital Holography and Three-Dimensional Imaging (2009 : Vancouver, Canada)
School: School of Mechanical and Aerospace Engineering
Rights: © 2009 Optical Society of America. This paper was published in OSA Technical Digest and is made available as an electronic reprint (preprint) with permission of Optical Society of America. The paper can be found at URL: http://www.opticsinfobase.org/abstract.cfm?uri=DH-2009-JTuA2. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.
Version: Published version

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