mirage

Digital holography for MEMS application.

DSpace/Manakin Repository

 

Search DR-NTU


Advanced Search Subject Search

Browse

My Account

Digital holography for MEMS application.

Show full item record

Title: Digital holography for MEMS application.
Author: Anand, Asundi.; Singh, Vijay Raj.
Copyright year: 2009
Abstract: Studies on digital holographic microscopy for full field high resolution 3-D profiling of MEMS and micro-devices are presented. Applications for thin film thickness measurement and studies on a MEMS accelerometer are presented.
Subject: DRNTU::Science::Physics::Optics and light.
Type: Conference Paper
Conference name: Digital Holography and Three-Dimensional Imaging (2009 : Vancouver, Canada)
School: School of Mechanical and Aerospace Engineering
Rights: © 2009 Optical Society of America. This paper was published in OSA Technical Digest and is made available as an electronic reprint (preprint) with permission of Optical Society of America. The paper can be found at URL: http://www.opticsinfobase.org/abstract.cfm?uri=DH-2009-JTuA2. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.
Version: Published version

Files in this item

Files Size Format View
Published Paper.pdf 146.7Kb PDF View/Open
   

SFX Query

- Get published version (via NTU subscribed resources)
   

This item appears in the following Collection(s)

Show full item record

Statistics

Total views

All Items Views
Digital holography for MEMS application. 384

Total downloads

All Bitstreams Views
Published Paper.pdf 208

Top country downloads

Country Code Views
United States of America 89
China 36
Singapore 35
Japan 7
Taiwan 6

Top city downloads

city Views
Mountain View 39
Singapore 35
Beijing 20
Redwood City 5
Taipei 5

Downloads / month

  2014-02 2014-03 2014-04 total
Published Paper.pdf 0 0 4 4