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Digital holography for MEMS application

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Digital holography for MEMS application

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dc.contributor.author Anand, Asundi
dc.contributor.author Singh, Vijay Raj
dc.date.accessioned 2011-09-29T04:16:20Z
dc.date.available 2011-09-29T04:16:20Z
dc.date.copyright 2009
dc.date.issued 2011-09-29
dc.identifier.citation Anand, A. & Singh, V. R. (2009). Digital Holography for MEMS Application. Digital Holography and Three-Dimensional Imaging (DH) (2009:Vancouver).
dc.identifier.uri http://hdl.handle.net/10220/7116
dc.description.abstract Studies on digital holographic microscopy for full field high resolution 3-D profiling of MEMS and micro-devices are presented. Applications for thin film thickness measurement and studies on a MEMS accelerometer are presented.
dc.format.extent 3 p.
dc.language.iso en
dc.rights © 2009 Optical Society of America. This paper was published in OSA Technical Digest and is made available as an electronic reprint (preprint) with permission of Optical Society of America. The paper can be found at URL: http://www.opticsinfobase.org/abstract.cfm?uri=DH-2009-JTuA2. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.
dc.subject DRNTU::Science::Physics::Optics and light.
dc.title Digital holography for MEMS application
dc.type Conference Paper
dc.contributor.conference Digital Holography and Three-Dimensional Imaging (2009 : Vancouver, Canada)
dc.contributor.school School of Mechanical and Aerospace Engineering
dc.identifier.openurl http://www.opticsinfobase.org/abstract.cfm?uri=DH-2009-JTuA2
dc.description.version Published version
dc.identifier.rims 143358

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