MEMS-micropumps : a review

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MEMS-micropumps : a review

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Title: MEMS-micropumps : a review
Author: Nguyen, Nam-Trung; Huang, Xiaoyang; Chuan, Toh Kok
Copyright year: 2002
Abstract: Microfluidics has emerged from the MEMS-technology as an important research field and a promising market. This paper gives an overview on one of the most important microfluidic components: the micropump. In the last decade, various micropumps have been developed. There are only a few review papers on microfluidic devices and none of them were dedicated only to micropumps. This review paper outlines systematically the pump principles and their realization with MEMS-technology. Comparisons regarding pump size, flow rate, and backpressure will help readers to decide their proper design before starting a microfluidics project. Different pump principles are compared graphically and discussed in terms of their advantages and disadvantages for particular applications.
Subject: DRNTU::Engineering::Mechanical engineering
Type: Journal Article
Series/ Journal Title: Journal of fluids engineering
School: School of Mechanical and Aerospace Engineering
Rights: © 2002 American Society of Mechanical Engineers (ASME).

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