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MEMS-micropumps : a review

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MEMS-micropumps : a review

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dc.contributor.author Nguyen, Nam-Trung
dc.contributor.author Huang, Xiaoyang
dc.contributor.author Chuan, Toh Kok
dc.date.accessioned 2012-05-03T04:43:58Z
dc.date.available 2012-05-03T04:43:58Z
dc.date.copyright 2002
dc.date.issued 2012-05-03
dc.identifier.citation Nguyen, N. T., Huang, X. Y., & Chuan, T. K. (2002). MEMS-Micropumps: A Review. Journal of Fluids Engineering, 124(2), 384.
dc.identifier.uri http://hdl.handle.net/10220/7806
dc.description.abstract Microfluidics has emerged from the MEMS-technology as an important research field and a promising market. This paper gives an overview on one of the most important microfluidic components: the micropump. In the last decade, various micropumps have been developed. There are only a few review papers on microfluidic devices and none of them were dedicated only to micropumps. This review paper outlines systematically the pump principles and their realization with MEMS-technology. Comparisons regarding pump size, flow rate, and backpressure will help readers to decide their proper design before starting a microfluidics project. Different pump principles are compared graphically and discussed in terms of their advantages and disadvantages for particular applications.
dc.format.extent 26 p.
dc.language.iso en
dc.relation.ispartofseries Journal of fluids engineering
dc.rights © 2002 American Society of Mechanical Engineers (ASME).
dc.subject DRNTU::Engineering::Mechanical engineering
dc.title MEMS-micropumps : a review
dc.type Journal Article
dc.contributor.school School of Mechanical and Aerospace Engineering
dc.identifier.doi http://dx.doi.org.ezlibproxy1.ntu.edu.sg/10.1115/1.1459075
dc.identifier.rims 82995

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