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A fully polymeric micropump with piezoelectric actuator

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A fully polymeric micropump with piezoelectric actuator

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dc.contributor.author Nguyen, Nam-Trung
dc.contributor.author Truong, Thai-Quang
dc.date.accessioned 2012-05-03T06:19:20Z
dc.date.available 2012-05-03T06:19:20Z
dc.date.copyright 2003
dc.date.issued 2012-05-03
dc.identifier.citation Nguyen, N. T., & Truong, T. Q. (2003). A fully polymeric micropump with piezoelectric actuator. Sensors and Actuators B: Chemical, 97(1), 137-143.
dc.identifier.uri http://hdl.handle.net/10220/7808
dc.description.abstract This paper presents a new concept of designing and fabricating polymeric micropumps. The micro pump is made of SU-8 photoresist and polymethylmethacrylate (PMMA). The key elements of the micropump are the micro check valves, which are fabricated in a 100-μm-thick SU-8 film. The SU-8 part is designed as a disc with 10-mm diameter. The check valves are 1-mm discs suspended on a compliant orthoplanar spring with four arms. The cross section of the spring beam has a dimension of μm. The pump is designed as a stack of different layers, which are made of PMMA and SU-8. In contrast to their silicon counterparts, the low spring constant of the SU-8 check valves allows the use of relatively low drive voltages on the order of several 10 V for the piezodisc, which works as the pump’s actuator. Pump rates up to 1 ml/min and back pressures up to 200 mm water have been achieved. The pump design shows the feasibility of our current effort to make microfluidic systems based on the lamination of different polymeric materials.
dc.format.extent 14 p.
dc.language.iso en
dc.relation.ispartofseries Sensors and actuators B : chemical
dc.rights © 2003 Elsevier. This is the author created version of a work that has been peer reviewed and accepted for publication by Sensors and Actuators B: Chemical, Elsevier. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: DOI: [http://dx.doi.org.ezlibproxy1.ntu.edu.sg/10.1016/S0925-4005(03)00521-5].
dc.subject DRNTU::Engineering::Mechanical engineering.
dc.title A fully polymeric micropump with piezoelectric actuator
dc.type Journal Article
dc.contributor.school School of Mechanical and Aerospace Engineering
dc.identifier.doi http://dx.doi.org.ezlibproxy1.ntu.edu.sg/10.1016/S0925-4005(03)00521-5
dc.description.version Accepted version
dc.identifier.rims 86449

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