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Proposal for micromachined accelerometer, based on a contactless suspension with zero spring constant

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Proposal for micromachined accelerometer, based on a contactless suspension with zero spring constant

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Title: Proposal for micromachined accelerometer, based on a contactless suspension with zero spring constant
Author: Poletkin, Kirill V.; Chernomorsky, Alexsandr I.; Shearwood, Christopher
Copyright year: 2012
Abstract: In this paper, a micromachined accelerometer, based on a contactless suspension with a zero spring constant which is a new challenge that provides possibility to significantly increasing accuracies of the micromachined inertial sensor is proposed. Minimization of the spring constant of the contactless suspension is achieved by combining inductive and electrical contactless suspensions. To study the conditions required to eliminate the spring constant of the suspension and achieve stable levitation of the accelerometer proof mass, a mathematical model of the suspension is developed. It is shown that such a suspension can be developed in principle.
Subject: DRNTU::Engineering::Electrical and electronic engineering.DRNTU::Engineering::Aeronautical engineering.
Type: Journal Article
Series/ Journal Title: IEEE sensors journal
School: School of Mechanical and Aerospace Engineering
Rights: © 2011 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. The published version is available at: [DOI: http://dx.doi.org/10.1109/JSEN.2012.2188831].
Version: Accepted version

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