| dc.contributor.author |
Zhao, H. B. |
| dc.contributor.author |
Pey, Kin Leong. |
| dc.contributor.author |
Choi, W. K. |
| dc.contributor.author |
Chattopadhyay, Sujay. |
| dc.contributor.author |
Fitzgerald, E. A. |
| dc.contributor.author |
Antoniadis, D. A. |
| dc.contributor.author |
Lee, Pooi See. |
| dc.date.accessioned |
2012-05-16T08:05:36Z |
| dc.date.available |
2012-05-16T08:05:36Z |
| dc.date.copyright |
2002 |
| dc.date.issued |
2012-05-16 |
| dc.identifier.citation |
Zhao, H. B., Pey, K. L., Choi, W. K., Chattopadhyay, S., Fitzgerald, E. A., Antoniadis, D. A., et al. (2002). Interfacial reacions of Ni on Si1-xGex (x=0.2, 0.3) at low temperature by rapid thermal annealing. Journal of Applied Physics, 92, 214-217. |
| dc.identifier.uri |
http://hdl.handle.net/10220/8031 |
| dc.description.abstract |
The interfacial reaction of Ni with relaxed Si1-xGex (x=0.2,0.3) films in the low temperature range,
viz., 300–500 °C, has been investigated and compared with that of Ni with Si (i.e., x=0).
Ni2(Si1-xGex) and Ni3(Si1-xGex)2 were observed at 300 °C whereas a uniform film of
Ni(Si1-xGex) was formed at 400 °C for both Si0.8Ge0.2 and Si0.7Ge0.3 substrates. At 500 °C, a mixed
layer consisting of Ni(Si1-yGey) and Si1-zGez was formed with a relation of z>x>y. Sheet
resistance measurement results show that the silicided film attains its lowest value at an annealing
temperature of 400 °C. The approximate values of the resistivity of the corresponding uniform
Ni(Si1-xGex) (x=0.2, 0.3) derived from the transmission electron microscope and sheet resistance
results are 19 and 23 μΩcm, respectively. |
| dc.format.extent |
4 p. |
| dc.language.iso |
en |
| dc.relation.ispartofseries |
Journal of applied physics |
| dc.rights |
© 2002 American Institute of Physics. This paper was published in Journal of Applied Physics and is made available as an electronic reprint (preprint) with permission of American Institute of Physics. The paper can be found at the following official URL: http://dx.doi.org/10.1063/1.1482423. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. |
| dc.subject |
DRNTU::Engineering::Materials. |
| dc.title |
Interfacial reacions of Ni on Si1-xGex (x=0.2, 0.3) at low temperature by rapid thermal annealing. |
| dc.type |
Journal Article |
| dc.contributor.school |
School of Materials Science and Engineering |
| dc.identifier.doi |
http://dx.doi.org/10.1063/1.1482423 |
| dc.description.version |
Published version |
