Laser induced Ni(Ti) silicide formation

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Laser induced Ni(Ti) silicide formation

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dc.contributor.author Setiawan, Y.
dc.contributor.author Lee, Pooi See
dc.contributor.author Pey, Kin Leong
dc.contributor.author Wang, X. C.
dc.contributor.author Lim, G. C.
dc.date.accessioned 2012-05-17T09:17:02Z
dc.date.available 2012-05-17T09:17:02Z
dc.date.copyright 2006
dc.date.issued 2012-05-17
dc.identifier.citation Setiawan, Y., Lee, P. S., Pey, K. L., Wang, X. C., & Lim, G. C. (2006). Laser induced Ni(Ti) silicide formation. Applied Physics Letters, 88(11).
dc.identifier.uri http://hdl.handle.net/10220/8093
dc.description.abstract Effects of Ti alloying during laser-induced Ni silicide formation is studied. Unique triple layer microstructures were found with the presence of supercell in the NiSi2 grains formed at the interface. This supercell formation was caused by a local ordering of Ni and Si atoms that favor lower free energy during rapid solidification. Ti rapidly segregates from the alloy melt and forms a protective TiOx overlayer on the surface during solidification. Melt front progressing towards the Ni-rich region leads to quenching of an amorphous layer sandwiched between NiSi2 grains and the TiOx overlayer.
dc.format.extent 3 p.
dc.language.iso en
dc.relation.ispartofseries Applied physics letters
dc.rights © 2006 American Institute of Physics. This paper was published in Applied Physics Letters and is made available as an electronic reprint (preprint) with permission of American Institute of Physics. The paper can be found at the following official URL: http://dx.doi.org/10.1063/1.2186073. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.
dc.subject DRNTU::Engineering::Materials::Microelectronics and semiconductor materials.
dc.title Laser induced Ni(Ti) silicide formation
dc.type Journal Article
dc.contributor.school School of Materials Science and Engineering
dc.identifier.doi http://dx.doi.org/10.1063/1.2186073
dc.description.version Published version

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