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Magnetron sputtered TiO2 films on a stainless steel substrate : selective rutile phase formation and its tribological and anti-corrosion performance

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Magnetron sputtered TiO2 films on a stainless steel substrate : selective rutile phase formation and its tribological and anti-corrosion performance

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dc.contributor.author Krishna, Dangeti Siva Rama
dc.contributor.author Sun, Yong
dc.contributor.author Chen, Zhong
dc.date.accessioned 2012-05-29T07:40:21Z
dc.date.available 2012-05-29T07:40:21Z
dc.date.copyright 2011
dc.date.issued 2012-05-29
dc.identifier.citation Krishna, D. S. R., Sun, Y., Chen, Z. (2011). Magnetron Sputtered TiO2 Films on a Stainless Steel Substrate: Selective Rutile Phase Formation and Its Tribological and Anti-corrosion Performance. Thin Solid Films, 519(15), 4860–4864. .
dc.identifier.uri http://hdl.handle.net/10220/8172
dc.description.abstract In this work, TiO2 films on 316L stainless steel have been formed by non-reactive magnetron sputtering of TiO2 target. The effect of a titanium underlayer on the crystalline phase of the TiO2 film has been investigated in terms of phase evolution, film morphology, corrosion resistance, adhesion strength, hardness and tribological characteristics. Results showed that the titanium underlayer has a significant effect on the phase of the TiO2 film. Without this underlayer, an anatase TiO2 film is produced, in consistence with many other investigations. However, it is found that with a titanium underlayer, a rutile TiO2 film can be directly formed on the substrate. The thickness of the interface layer affects the crystallinity of the rutile film. By controlling the underlayer thickness, the resultant rutile film crystal structure and morphology could be changed accordingly. At an optimized state, the rutile coating shows much improved adhesion, friction, wear and corrosion properties.
dc.format.extent 22 p.
dc.language.iso en
dc.relation.ispartofseries Thin solid films
dc.rights © 2011 Elsevier. This is the author created version of a work that has been peer reviewed and accepted for publication by Thin Solid Films, Elsevier. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [http://dx.doi.org/10.1016/j.tsf.2011.01.042].
dc.subject DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
dc.title Magnetron sputtered TiO2 films on a stainless steel substrate : selective rutile phase formation and its tribological and anti-corrosion performance
dc.type Journal Article
dc.contributor.school School of Materials Science and Engineering
dc.identifier.doi http://dx.doi.org/10.1016/j.tsf.2011.01.042
dc.description.version Accepted version

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