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Title:
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Fabrication of sub-50-nm solid-state nanostructures on the basis of dip-pen nanolithography.
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Author:
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Zhang, Hua.; Chung, Sung-Wook.; Mirkin, Chad A.
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Copyright year:
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2003 |
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Abstract:
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The fabrication of arrays of sub-50-nm gold dots and line structures with deliberately designed 12−100-nm gaps is reported. These structures were made by initially using dip-pen nanolithography to pattern the etch resist, 16-mercaptohexadecanoic acid, on Au/Ti/SiOx/Si substrates and then using wet-chemical etching to remove the exposed gold. |
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Subject:
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DRNTU::Engineering::Materials. |
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Type:
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Journal Article |
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Series/ Journal Title:
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Nano letters |
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School:
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School of Materials Science and Engineering |
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Rights:
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© 2003 American Chemical Society. |
