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Title: | Zinc oxide thin films nanostructures metal organic chemical vapor deposition | Authors: | Tan, Swee Tiam | Keywords: | DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics | Issue Date: | 2007 | Source: | Tan, S. T. (2007). Zinc oxide thin films nanostructures metal organic chemical vapor deposition. Doctoral thesis, Nanyang Technological University, Singapore. | Abstract: | In this dissertation, the investigation on growth and post-growth annealing treatment of ZnO thin films, deposited by a home-made metal organic chemical vapor deposition (MOCVD), is presented. The growth of the ZnO thin films was studied with various growth parameters and reactor designs. ZnO quantum dots embedded films, highly c-axis oriented ZnO films, p-type ZnO thin films and ZnO nanostructures were fabricated and investigated. | URI: | https://hdl.handle.net/10356/3516 | DOI: | 10.32657/10356/3516 | Schools: | School of Electrical and Electronic Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
Appears in Collections: | EEE Theses |
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EEE-THESES_1370.pdf | 11.83 MB | Adobe PDF | View/Open |
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