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https://hdl.handle.net/10356/5336
Title: | Development of MEMS RF inductors on silicon wafers | Authors: | Wang, Guang Yu | Keywords: | DRNTU::Engineering::Manufacturing | Issue Date: | 2002 | Abstract: | In this project, a micromachined inductor on silicon wafer is presented. | URI: | http://hdl.handle.net/10356/5336 | Schools: | School of Mechanical and Production Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
Appears in Collections: | MAE Theses |
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File | Description | Size | Format | |
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MAE-THESES_1082.pdf Restricted Access | 2.59 MB | Adobe PDF | View/Open |
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