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https://hdl.handle.net/10356/84267
Title: | Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators | Authors: | Yuan, Yanhui Wong, Yoke Rung Xia, Xin Du, Hejun |
Keywords: | ZnO Thin-film sensor |
Issue Date: | 2014 | Source: | Xia, X., Du, H., Wong, Y. R., & Yuan, Y. (2014). Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators. Proceedings of the 1st International Conference on Progress in Additive Manufacturing (Pro-AM 2014), 358-363. | Conference: | Proceedings of the 1st International Conference on Progress in Additive Manufacturing (Pro-AM 2014) | Abstract: | To realize higher areal densities in hard disk drive (HDD), it is necessary to decrease distance between slider and disk, i.e. flying height. The low flying height may result in severe damage occurring on the head-disk interface. Therefore, it is essential to monitor head-disk interactions to prevent instability and damage. In this paper, a smart slider integrated with micro-sensor and micro-actuator is proposed. The fabrication and characterization of the smart slider with integrated zinc oxide (ZnO) thin-film sensor and actuator is presented here. A possible 3D printing manufacturing approach is also proposed to replace the current complex MEMS fabrication processes for producing the smart slider. | URI: | https://hdl.handle.net/10356/84267 http://hdl.handle.net/10220/41689 |
DOI: | 10.3850/978-981-09-0446-3_073 | Schools: | School of Mechanical and Aerospace Engineering | Research Centres: | Singapore Centre for 3D Printing | Rights: | © 2014 by Research Publishing Services. | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
Appears in Collections: | MAE Conference Papers Pro-AM Conference Papers |
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Fabrication and characterization of smart sliders with integrated zno thin-film sensors and actuators.pdf | 392 kB | Adobe PDF | View/Open |
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