Browsing by Author Ee, Elden Yong Chiang


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Issue DateTitleAuthor(s)
2005Formation of Ti-Si-N film using low frequency, high density inductively coupled plasma processRutkevych, P. P.; Zeng, K. Y.; Chen, Z.; Chan, L.; See, K. H.; Law, S. B.; Xu, S.; Tsakadze, Z. L.; Shen, L.; Ee, Elden Yong Chiang
2006Low temperature physical-chemical vapor deposition of Ti-Si-N-O barrier filmsLu, T. M.; Law, S. B.; Chen, Z.; Ee, Elden Yong Chiang; Dong, Zhili
2006Plasma assisted deposition of Ti-Si-N and Ti-Si-N-O diffusion barrier filmsEe, Elden Yong Chiang