Browsing by Author Nguyen, N. Y.
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|2015||Improvement of the pad wear shape in fixed abrasive chemical-mechanical polishing for manufacturing optical components||Nguyen, N. Y.; Tian, Y. B.; Zhong, Z. W.|
|2014||Modeling and simulation for the distribution of slurry particles in chemical mechanical polishing||Nguyen, N. Y.; Tian, Yebing; Zhong, Zhao Wei|