Browsing by Author Nguyen, N. Y.

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Showing results 2 to 3 of 3 < previous 
Issue DateTitleAuthor(s)
2015Improvement of the pad wear shape in fixed abrasive chemical-mechanical polishing for manufacturing optical componentsNguyen, N. Y.; Tian, Y. B.; Zhong, Z. W.
 2014Modeling and simulation for the distribution of slurry particles in chemical mechanical polishingNguyen, N. Y.; Tian, Yebing; Zhong, Zhao Wei