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Shen, L.
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Showing results 2 to 3 of 3
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Issue Date
Title
Author(s)
2005
Formation of Ti-Si-N film using low frequency, high density inductively coupled plasma process
Rutkevych, P. P.
;
Zeng, K. Y.
;
Chen, Z.
;
Chan, L.
;
See, K. H.
;
Law, S. B.
;
Xu, S.
;
Tsakadze, Z. L.
;
Shen, L.
;
Ee, Elden Yong Chiang
2014
Influence of different CH4/N2 ratios on structural and mechanical properties of a-CNx : H film synthesized using plasma focus
Umar, Z. A.
;
Ahmad, R.
;
Rawat, R. S.
;
Hussnain, A.
;
Khalid, N.
;
Chen, Z.
;
Shen, L.
;
Zhang, Z.
;
Hussain, T.