Browsing by Author Sun, Quqin
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| Issue Date | Title | Author(s) | |
|---|---|---|---|
 | 2019 | Noncontact thickness measurement of Cu film on silicon wafer using magnetic resonance coupling for stress free polishing application | Qu, Zilian; Wang, Wensong; Yang, Shuhui; Sun, Quqin; Fang, Zhongyuan; Zheng, Yuanjin |