Browsing by Author Bourgade, Thomas

Showing results 1 to 3 of 3
Issue DateTitleAuthor(s)
2015Phase shift reflectometry for wafer inspectionPeng, Kuang; Cao, Yiping; Li, Hongru; Sun, Jianfei; Bourgade, Thomas; Asundi, Anand Krishna
2015Silicon wafer microstructure imaging using InfraRed Transport of Intensity EquationLi, Hongru; Feng, Guoying; Bourgade, Thomas; Zuo, Chao; Du, Yongzhao; Zhou, Shouhuan; Asundi, Anand
2015Wavefront subaperture stitching with Shack-Hartmann sensorLi, Hongru; Feng, Guoying; Sun, Jianfei; Bourgade, Thomas; Zhou, Shouhuan; Asundi, Anand