Browsing by Author Chan, L.

Showing results 1 to 13 of 13
Issue DateTitleAuthor(s)
2008Dual nanowire silicon MOSFET with silicon bridge and TaN gateTheng, A. L.; Goh, Wang Ling; Ng, C. M.; Chan, L.; Lo, Guo-Qiang
2002Effect of ion implantation on layer inversion of Ni silicided poly-SiMangelinck, D.; Osipowicz, T.; Dai, J. Y.; Chan, L.; Lee, Pooi See; Pey, Kin Leong; Ding, Jun; Chi, Dong Zhi
2004Effect of processing parameters on electroless Cu seed layer propertiesChen, Z.; Chan, L.; See, Alex K. H.; Law, S. B.; Zeng, K. Y.; Shen, L.; Tee, K. C.; Ee, Elden Yong Chiang
2004Electroless copper deposition as a seed layer on TiSiN barrierChen, Z.; Xu, S.; Chan, L.; See, K. H.; Law, S. B.; Ee, Elden Yong Chiang
2008An extensive study on the boron junctions formed by optimized pre-spike∕multiple-pulse flash lamp annealing schemes : junction formation, stability and leakageTan, Dexter Xue Ming; Pey, Kin Leong; Yeong, S. H.; Colombeau, B.; Poon, C. H.; Mok, K. R. C.; See, A.; Benistant, F.; Ng, C. M.; Chan, L.; Srinivasan, M. P.
2005Formation of Ti-Si-N film using low frequency, high density inductively coupled plasma processRutkevych, P. P.; Zeng, K. Y.; Chen, Z.; Chan, L.; See, K. H.; Law, S. B.; Xu, S.; Tsakadze, Z. L.; Shen, L.; Ee, Elden Yong Chiang
2000Improved NiSi salicide process using presilicide N2+ implant for MOSFETsWee, A. T. S.; Chan, L.; Mangelinck, D.; Lee, Pooi See; Pey, Kin Leong; Ding, Jun
 2003In situ XRD analysis of Ni(Pt)/Si(100) reactions in low temperature regime ≤400°CMangelinck, D.; Chan, L.; Lee, Pooi See; Pey, Kin Leong; Ding, Jun
2009Lanthanide-based graded barrier structure for enhanced nanocrystal memory propertiesChan, T. K.; Osipowicz, T.; Chan, L.; Chan, Mei Yin; Lee, Pooi See
2001New salicidation technology with Ni(Pt) alloy for MOSFETsMangelinck, D.; Chan, L.; Lee, Pooi See; Pey, Kin Leong; Ding, Jun; Chi, Dong Zhi
2002Phase and layer stability of Ni- and Ni(Pt)-silicides on narrow poly-Si linesMangelinck, D.; Dai, J. Y.; Chan, L.; Ding, Jun; Chi, Dong Zhi; Lee, Pooi See; Pey, Kin Leong
 2008Plasmon-enhanced polarized Raman spectroscopy for sensitive surface characterizationNi, Zhenhua; Lee, Pooi See; Shen, Zexiang; Kasim, J.; Tee, X. Y.; You, Y. M.; Setiawan, Y.; Chan, L.
 2012The role of a tensile stress bias for a sensitive silicon mechanical stress sensor based on a change in gate-induced-drain leakage currentLau, W. S.; Yang, Peizhen.; Siah, S. Y.; Chan, L.