Browsing by Author Lai, S. T.

Showing results 1 to 2 of 2
Issue DateTitleAuthor(s)
 2013Development of fixed abrasive chemical mechanical polishing process for glass disk substratesTian, Ye Bing; Zhong, Zhao Wei; Lai, S. T.; Ang, Y. J.
 2012Slurry flow visualisation of chemical mechanical polishing based on a computational fluid dynamics modelTian, Y. B.; Lai, S. T.; Zhong, Z. W.