Browsing by Author Lai, S. T.
Showing results 1 to 2 of 2
|2013||Development of fixed abrasive chemical mechanical polishing process for glass disk substrates||Tian, Ye Bing; Zhong, Zhao Wei; Lai, S. T.; Ang, Y. J.|
|2012||Slurry flow visualisation of chemical mechanical polishing based on a computational fluid dynamics model||Tian, Y. B.; Lai, S. T.; Zhong, Z. W.|