Browsing by Author Liang, M. H.

Showing results 1 to 2 of 2
Issue DateTitleAuthor(s)
 2002Atomic stacking configurations in atomic layer deposited TiN filmsPark, H. S.; Lim, B. K.; Liang, M. H.; Sun, C. Q.; Gao, W.; Li, Sean; Dong, Zhili
2009Formation and characterization of magnetron sputtered Ta–Si–N–O thin filmsXu, S.; Chen, Z.; Yan, H.; Li, L.; Ho, F. Y.; Liang, M. H.; Pan, J. S.