Browsing by Author
Liu, Mahe
Showing results 1 to 3 of 3
| Issue Date | Title | Author(s) |
| 2000 | Demonstration lithography using plasma focus soft x-ray source | Lee, Sing; Wong, Terence Kin Shun; Feng, Xianping; Lee, Paul Choon Keat; Springham, Stuart V.; Serban, Adrian; Liu, Mahe; Kudryashov, Vladimir; Gribkov, Vladimir A.; Rajdeep Singh Rawat |
| 2002 | Development of the lithographic sources and processes for device fabrication | Wong, Terence Kin Shun; Lee, Sing; Xu, Shuyan; Lee, Paul Choon Keat; Tan, Augustine Tuck Lee; Rawat, Rajdeep Singh; Liu, Mahe; Ostrikov, Kostyantyn; Vladimir Koudriachov; Li, Yin An |
| 1999 | Plasma radiation sources for X-ray lithography and neutron analysis applications | Lee, Sing; Wong, Terence Kin Shun; Feng, Xianping; Lee, Paul Choon Keat; Springham, Stuart V.; Serban, Adrian; Liu, Mahe; Kudryashov, Vladimir; Gribkov, Vladimir A.; Rajdeep Singh Rawat |