Browsing by Author Liu, Mahe

Showing results 1 to 3 of 3
Issue DateTitleAuthor(s)
2000Demonstration lithography using plasma focus soft x-ray sourceLee, Sing; Wong, Terence Kin Shun; Feng, Xianping; Lee, Paul Choon Keat; Springham, Stuart V.; Serban, Adrian; Liu, Mahe; Kudryashov, Vladimir; Gribkov, Vladimir A.; Rajdeep Singh Rawat
2002Development of the lithographic sources and processes for device fabricationWong, Terence Kin Shun; Lee, Sing; Xu, Shuyan; Lee, Paul Choon Keat; Tan, Augustine Tuck Lee; Rawat, Rajdeep Singh; Liu, Mahe; Ostrikov, Kostyantyn; Vladimir Koudriachov; Li, Yin An
1999Plasma radiation sources for X-ray lithography and neutron analysis applicationsLee, Sing; Wong, Terence Kin Shun; Feng, Xianping; Lee, Paul Choon Keat; Springham, Stuart V.; Serban, Adrian; Liu, Mahe; Kudryashov, Vladimir; Gribkov, Vladimir A.; Rajdeep Singh Rawat