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Nguyen, N. Y.
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Showing results 1 to 3 of 3
Issue Date
Title
Author(s)
2014
An analytical investigation of pad wear caused by the conditioner in fixed abrasive chemical–mechanical polishing
Nguyen, N. Y.
;
Zhong, Zhao Wei
;
Tian, Yebing
2015
Improvement of the pad wear shape in fixed abrasive chemical-mechanical polishing for manufacturing optical components
Nguyen, N. Y.
;
Tian, Y. B.
;
Zhong, Z. W.
2014
Modeling and simulation for the distribution of slurry particles in chemical mechanical polishing
Nguyen, N. Y.
;
Tian, Yebing
;
Zhong, Zhao Wei
