Browsing by Author Nguyen, N. Y.
Showing results 1 to 3 of 3
| Issue Date | Title | Author(s) | |
|---|---|---|---|
| 2014 | An analytical investigation of pad wear caused by the conditioner in fixed abrasive chemical–mechanical polishing | Nguyen, N. Y.; Zhong, Zhao Wei; Tian, Yebing | |
 | 2015 | Improvement of the pad wear shape in fixed abrasive chemical-mechanical polishing for manufacturing optical components | Nguyen, N. Y.; Tian, Y. B.; Zhong, Z. W. |
| 2014 | Modeling and simulation for the distribution of slurry particles in chemical mechanical polishing | Nguyen, N. Y.; Tian, Yebing; Zhong, Zhao Wei |