Browsing by Author Nguyen, N. Y.
Showing results 1 to 3 of 3
|2014||An analytical investigation of pad wear caused by the conditioner in fixed abrasive chemical–mechanical polishing||Nguyen, N. Y.; Zhong, Zhao Wei; Tian, Yebing|
|2015||Improvement of the pad wear shape in fixed abrasive chemical-mechanical polishing for manufacturing optical components||Nguyen, N. Y.; Tian, Y. B.; Zhong, Z. W.|
|2014||Modeling and simulation for the distribution of slurry particles in chemical mechanical polishing||Nguyen, N. Y.; Tian, Yebing; Zhong, Zhao Wei|