Browsing by Author Oh, Yun Sheng.
Showing results 1 to 1 of 1
Issue Date | Title | Author(s) | |
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2009 | Investigation of silicon-based encapsulation for MEMS structures using epi-based processing | Oh, Yun Sheng. |
Issue Date | Title | Author(s) | |
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2009 | Investigation of silicon-based encapsulation for MEMS structures using epi-based processing | Oh, Yun Sheng. |