Browsing by Author
Park, H. S.
Showing results 1 to 2 of 2
| Issue Date | Title | Author(s) |
| 2002 | Atomic stacking configurations in atomic layer deposited TiN films | Park, H. S.; Lim, B. K.; Liang, M. H.; Sun, C. Q.; Gao, W.; Li, Sean; Dong, Zhili |
| 2002 | Formation of Cu diffusion channels in Ta layer of a Cu/Ta/SiO2/Si structure | Li, S.; Dong, Zhili; Maung Latt, K.; Park, H. S.; White, Timothy John |