Browsing by Author Qu, Zilian

Showing results 1 to 3 of 3
Issue DateTitleAuthor(s)
 2017Design of broadband phased array antenna at X-bandWang, Wensong; Qu, Zilian; Shen, Zhongxiang; Lou, Liheng; Tang, Kai; Zheng, Yuanjin
 2020Measurement and error analysis of Cu film thickness with Ta barrier layer on wafer for CMP applicationQu, Zilian; Wang, Wensong; Li, Xueli; Li, Qi; Zheng, Yuanjin
2019Noncontact thickness measurement of Cu film on silicon wafer using magnetic resonance coupling for stress free polishing applicationQu, Zilian; Wang, Wensong; Yang, Shuhui; Sun, Quqin; Fang, Zhongyuan; Zheng, Yuanjin