Browsing by Author Tian, Y. B.
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|2015||Improvement of the pad wear shape in fixed abrasive chemical-mechanical polishing for manufacturing optical components||Nguyen, N. Y.; Tian, Y. B.; Zhong, Z. W.|
|2011||Optimization of the chemical mechanical polishing process for optical silicon substrates||Zhong, Z. W.; Tian, Y. B.; Ang, Y. J.; Wu, H.|
|2012||Slurry flow visualisation of chemical mechanical polishing based on a computational fluid dynamics model||Tian, Y. B.; Lai, S. T.; Zhong, Z. W.|