Browsing by Author Tian, Y. B.

Showing results 1 to 3 of 3
Issue DateTitleAuthor(s)
2015Improvement of the pad wear shape in fixed abrasive chemical-mechanical polishing for manufacturing optical componentsNguyen, N. Y.; Tian, Y. B.; Zhong, Z. W.
 2011Optimization of the chemical mechanical polishing process for optical silicon substratesZhong, Z. W.; Tian, Y. B.; Ang, Y. J.; Wu, H.
 2012Slurry flow visualisation of chemical mechanical polishing based on a computational fluid dynamics modelTian, Y. B.; Lai, S. T.; Zhong, Z. W.