Browsing by Author Tian, Yebing

Showing results 1 to 3 of 3
Issue DateTitleAuthor(s)
 2014An analytical investigation of pad wear caused by the conditioner in fixed abrasive chemical–mechanical polishingNguyen, N. Y.; Zhong, Zhao Wei; Tian, Yebing
 2013Effects of chemical slurries on fixed abrasive chemical-mechanical polishing of optical silicon substratesTian, Yebing; Zhong, Zhaowei; Ng, Jun Hao
 2014Modeling and simulation for the distribution of slurry particles in chemical mechanical polishingNguyen, N. Y.; Tian, Yebing; Zhong, Zhao Wei