Browsing by Author Ware, Simon Ian

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Issue DateTitleAuthor(s)
2020Efficient approach to scheduling of transient processes for time-constrained single-arm cluster tools with parallel chambersYang, Fajun; Qiao, Yan; Gao, Kaizhou; Wu, Naiqi; Zhu, Yuting; Ware, Simon Ian; Su, Rong