Browsing by Author Wu, Naiqi

Showing results 1 to 3 of 3
Issue DateTitleAuthor(s)
2018Efficient approach to cyclic scheduling of single-arm cluster tools with chamber cleaning operations and wafer residency time constraintYang, Fajun; Wu, Naiqi; Gao, Kaizhou; Zhang, Chunjiang; Zhu, Yuting; Su, Rong; Qiao, Yan
2017Petri net-based efficient determination of optimal schedules for transport-dominant single-arm multi-cluster toolsYang, Fajun; Wu, Naiqi; Qiao, Yan; Zhou, Mengchu; Su, Rong.; Qu, Ting
2017Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri netsYang, Fajun; Wu, Naiqi; Qiao, Yan; Su, Rong