Browsing by Author Yang, FaJun
Showing results 1 to 3 of 3
| Issue Date | Title | Author(s) | |
|---|---|---|---|
 | 2018 | Cyclic scheduling analysis of single-arm cluster tools with wafer residency time constraint and chamber cleaning operations | Yang, FaJun; Wu, NaiQi; Su, Rong; Qiao, Yan |
| 2017 | Modeling and optimal cyclic scheduling of time-constrained single-robot-arm cluster tools via Petri nets and linear programming | Yang, FaJun; Wu, NaiQi; Qiao, Yan; Zhou, MengChu; Su, Rong; Qu, Ting |
| 2018 | Scheduling and control of start-up process for time-constrained single-arm cluster tools with parallel chambers | Yang, FaJun; Qiao, Yan; Gao, KaiZhou; Wu, NaiQi; Zhu, YuTing; Simon, Ian Ware; Su, Rong |