Academic Profile : Faculty

Prof Xu Shuyan
Professor, National Institute of Education - Natural Sciences & Science Education
Professor, School of Physical & Mathematical Sciences (Courtesy Appointment)
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Shuyan is a professor of plasma physics with a combination of experimental, analytical, and computational knowledge and experiences. His research interests lie in the areas of physics and applications of high density plasmas, RMF current drive in fusion plasma, development of plasma facilities and diagnostic instrumentation, applications of nonequilibrium plasma for silicon photovoltaics and environment, and plasma aided
nano-fabrication and processing. He has conceived and founded a Plasma Sources and Applications Centre (PSAC) comprising of three research units: a) Plasma Processing Laboratory (PPL), b) Advanced Materials and Nanostructures Laboratory (AMNL), and c) Photovoltaic Research Laboratory (PRL). PSAC is equipped with a comprehensive range of plasma processing reactors and device fabrication tools, plasma diagnostics, materials and devices characterisation facilities, photovoltaic cell test equipment, and a class 10k clean room. Shuyan has had many achievements, including
~200 Journal publications and ~250 conference presentations,
2 Books ( by Wiley-VCH and World Scientific) and 2 book chapters (by CRC and Springer),
~60 Keynote addresses and invited talks, and
10 International patents.
Shuyan has been the Principal Investigator for 12 academic and industrial projects, winning a total of $5.1 million research grants through competitive external funding programmes. To date, he has supervised 18 PhD and 23 MSc/BSc(Hon) students, and hosted 12 Nobel Laureates' visits to his research Centre.
PSAC offers excellent resources and facilities for post-graduate research leading to a PhD. Enquiries are welcome at any time.
Academic Background
PhD: Flinders University, Australia (1991, Plasma Physics)
BSc: Nanjing University, China (1982, Semiconductor Physics)
Current Appointment
Professor of Physics, NIE, Nanyang Technological University (since 2004)
Fellow, Institute of Advanced Studies, NTU
Member, University Advisory Board, NTU
Chair, NTU Research Council Sub Committee for Cluster EP5P
Previous Appointment
Lecturer/ Senior Lecturer/ Associate Professor, NIE, NTU (1994-2004)
Vice Dean (Acad.), School of Physical and Mathematical Sciences, NTU (2005)
Denison Distinguished Visiting Professor, University of Sydney, Australia (2007-2008)
Editor-in-Chief, Singapore Journal of Physics (1998-2005)
Research Interests
Physics and generations of high density plasmas
In-situ diagnostics and deterministic control of non-equilibrium plasma in industrial plasma processes
such as etching, deposition, and ion implantation
Plasma for silicon photovoltaics and space use
Assembly and characterization of low dimensional materials and nanostructures
MHD Modelling, simulation of plasma dynamics and self-organization processes
Rotating magnetic field current drive in fusion plasmas
Atmospheric pressure plasma in environmental applications
Recent Research Grants
High Density Low Temperature Plasma Atomization by Impulsive Ion Impact [2014-2016, S$300,000; AcRF];
Development of Si Heterojunction Solar Cells via Advanced Plasma Technologies [2012-2015, S$300,000; A*STAR];
Low-Cost, Microcrystalline Silicon Thin-film Solar Cells via Advanced Plasma Processing [2008-2012, S$1.74 million, NRF]
Industrial Partners
Applied Materials - World leader in Semiconductor Equipment
Yingli Green Energy - World leader in PV manufacturing
Courses Taught
AAP101 - Understanding Essential Mechanics
AAP301 - Solid State Physics
AAP303 - Materials Science
MLS814 - Physical Methods for the Analysis of Energy Materials
MLS842 - Nanotechnology
MLS882 - Photovoltaic Physics and Solar Cells
BAP422 - Solid States & Semiconductor Physics
BAP537 - Advanced Materials
BAP423 - Plasma Physics
SC844 - Plasma Diagnostics
nano-fabrication and processing. He has conceived and founded a Plasma Sources and Applications Centre (PSAC) comprising of three research units: a) Plasma Processing Laboratory (PPL), b) Advanced Materials and Nanostructures Laboratory (AMNL), and c) Photovoltaic Research Laboratory (PRL). PSAC is equipped with a comprehensive range of plasma processing reactors and device fabrication tools, plasma diagnostics, materials and devices characterisation facilities, photovoltaic cell test equipment, and a class 10k clean room. Shuyan has had many achievements, including
~200 Journal publications and ~250 conference presentations,
2 Books ( by Wiley-VCH and World Scientific) and 2 book chapters (by CRC and Springer),
~60 Keynote addresses and invited talks, and
10 International patents.
Shuyan has been the Principal Investigator for 12 academic and industrial projects, winning a total of $5.1 million research grants through competitive external funding programmes. To date, he has supervised 18 PhD and 23 MSc/BSc(Hon) students, and hosted 12 Nobel Laureates' visits to his research Centre.
PSAC offers excellent resources and facilities for post-graduate research leading to a PhD. Enquiries are welcome at any time.
Academic Background
PhD: Flinders University, Australia (1991, Plasma Physics)
BSc: Nanjing University, China (1982, Semiconductor Physics)
Current Appointment
Professor of Physics, NIE, Nanyang Technological University (since 2004)
Fellow, Institute of Advanced Studies, NTU
Member, University Advisory Board, NTU
Chair, NTU Research Council Sub Committee for Cluster EP5P
Previous Appointment
Lecturer/ Senior Lecturer/ Associate Professor, NIE, NTU (1994-2004)
Vice Dean (Acad.), School of Physical and Mathematical Sciences, NTU (2005)
Denison Distinguished Visiting Professor, University of Sydney, Australia (2007-2008)
Editor-in-Chief, Singapore Journal of Physics (1998-2005)
Research Interests
Physics and generations of high density plasmas
In-situ diagnostics and deterministic control of non-equilibrium plasma in industrial plasma processes
such as etching, deposition, and ion implantation
Plasma for silicon photovoltaics and space use
Assembly and characterization of low dimensional materials and nanostructures
MHD Modelling, simulation of plasma dynamics and self-organization processes
Rotating magnetic field current drive in fusion plasmas
Atmospheric pressure plasma in environmental applications
Recent Research Grants
High Density Low Temperature Plasma Atomization by Impulsive Ion Impact [2014-2016, S$300,000; AcRF];
Development of Si Heterojunction Solar Cells via Advanced Plasma Technologies [2012-2015, S$300,000; A*STAR];
Low-Cost, Microcrystalline Silicon Thin-film Solar Cells via Advanced Plasma Processing [2008-2012, S$1.74 million, NRF]
Industrial Partners
Applied Materials - World leader in Semiconductor Equipment
Yingli Green Energy - World leader in PV manufacturing
Courses Taught
AAP101 - Understanding Essential Mechanics
AAP301 - Solid State Physics
AAP303 - Materials Science
MLS814 - Physical Methods for the Analysis of Energy Materials
MLS842 - Nanotechnology
MLS882 - Photovoltaic Physics and Solar Cells
BAP422 - Solid States & Semiconductor Physics
BAP537 - Advanced Materials
BAP423 - Plasma Physics
SC844 - Plasma Diagnostics
plasma for photovoltaics and environment,plasma nanoscience,plasma physics, sources and diagnostics
- GER Gradually Expanded Rotamak-Like Plasma Thruster
- Online Cleaning Solution for Wirebonders' Wedges
- Z-pinch based Space Propulsion: Modelling and Experimental Exploration
US 2016/0198558 A1: An Apparatus And Method For Diagnostics Of Neutral Radicals In Plasma (2018)
Abstract: An apparatus for diagnostics of neutral radicals in plasma, the apparatus comprising: a portable probe configured to be attached to and extend into a plasma chamber to obtain information from plasma contained in the plasma chamber, the probe comprising a metallic rod configured to be biased with an alternating current voltage applied to the probe to obtain current measurements; a transparent dielectric sleeve having a large bandgap configured to allow light transmission to obtain optical emission spectra from the plasma; and an insulated thermocouple junction provided in the metallic rod, the thermocouple junction configured to measure equilibrium temperature of the probe.
US 2015/0372167 A1: A Capacitatively Coupled Electrodeless Plasma Apparatus And A Method Using Capacitively Coupled Electrodeless Plasma For Processing A Silicon Substrate (2017)
Abstract: There is provided a capacitive coupled electodeless plasma apparatus for processing a silicon substrate. The apparatus includes at least one inductive antenna driven by time-varying power sources for providing at least one electrostatic field; and a chamber for locating the silicon substrate. There is also provided a method for processing a silicon substrate using capacitively coupled electrodeless plasma
Abstract: An apparatus for diagnostics of neutral radicals in plasma, the apparatus comprising: a portable probe configured to be attached to and extend into a plasma chamber to obtain information from plasma contained in the plasma chamber, the probe comprising a metallic rod configured to be biased with an alternating current voltage applied to the probe to obtain current measurements; a transparent dielectric sleeve having a large bandgap configured to allow light transmission to obtain optical emission spectra from the plasma; and an insulated thermocouple junction provided in the metallic rod, the thermocouple junction configured to measure equilibrium temperature of the probe.
US 2015/0372167 A1: A Capacitatively Coupled Electrodeless Plasma Apparatus And A Method Using Capacitively Coupled Electrodeless Plasma For Processing A Silicon Substrate (2017)
Abstract: There is provided a capacitive coupled electodeless plasma apparatus for processing a silicon substrate. The apparatus includes at least one inductive antenna driven by time-varying power sources for providing at least one electrostatic field; and a chamber for locating the silicon substrate. There is also provided a method for processing a silicon substrate using capacitively coupled electrodeless plasma
Courses Taught
AAP101 - Understanding Essential Mechanics
AAP301 - Solid State Physics
AAP303 - Materials Science
MLS814 - Physical Methods for the Analysis of Energy Materials
MLS842 - Nanotechnology
MLS882 - Photovoltaic Physics and Solar Cells
BAP422 - Solid States & Semiconductor Physics
BAP537 - Advanced Materials
BAP423 - Plasma Physics
SC844 - Plasma Diagnostics
AAP301 - Solid State Physics
AAP303 - Materials Science
MLS814 - Physical Methods for the Analysis of Energy Materials
MLS842 - Nanotechnology
MLS882 - Photovoltaic Physics and Solar Cells
BAP422 - Solid States & Semiconductor Physics
BAP537 - Advanced Materials
BAP423 - Plasma Physics
SC844 - Plasma Diagnostics