Fiber profilometer for measurement of hard-to-access areas
Wang, Qi Jie
Kok, Shaw Wei
Date of Issue2013
High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications (2nd : 2013 : San Francisco, USA)
School of Electrical and Electronic Engineering
A fiber profilometer is developed to measure hard-to-access areas. This system utilizes low coherence light interferometry technique to detect profiles of internal surfaces of samples. A differentiation method is employed to enhance vertical resolutions of imaging results. An auto-focusing scheme is proposed to obtain an optimized lateral resolution. The performance of the profilometer system is demonstrated by experimental studies.
DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio
© 2013 Society of Photo-Optical Instrumentation Engineers (SPIE). This paper was published in Proceedings of SPIE-High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications II and is made available as an electronic reprint (preprint) with permission of Society of Photo-Optical Instrumentation Engineers (SPIE). The paper can be found at the following official DOI: [http://dx.doi.org/10.1117/12.2003784]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.