Optimization of scanning strategy of digital Shack–Hartmann wavefront sensing
Date of Issue2012
School of Mechanical and Aerospace Engineering
Singapore Institute of Manufacturing Technology
In the traditional Shack–Hartmann wavefront sensing (SHWS) system, a lenslet array with a bigger configuration is desired to achieve a higher lateral resolution. However, practical implementation limits the configuration and this parameter is contradicted with the measurement range. We have proposed a digital scanning technique by making use of the high flexibility of a spatial light modulator to sample the reflected wavefront [LiX.ZhaoL. P.FangZ. P.TanC. S., “Improve lateral resolution in wavefront sensing with digital scanning technique,” in Asia-Pacific Conference of Transducers and Micro-Nano Technology (2006)]. The lenslet array pattern is programmed to laterally scan the whole aperture. In this paper, the methodology to optimize the scanning step for the purpose of form measurement is proposed. The correctness and effectiveness are demonstrated in numerical simulation and experimental investigation.
© 2012 Optical Society of America. This paper was published in Applied Optics and is made available as an electronic reprint (preprint) with permission of Optical Society of America. The paper can be found at the following official DOI: [http://dx.doi.org/10.1364/AO.51.000121]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.