Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/96581
Title: Influence of bias voltage on the hardness and toughness of CrAlN coatings via magnetron sputtering
Authors: Lee, Jyh-Wei
Lew, Wen Siang
Li, Bo
Zhang, Sam
Wang, Yu Xi
Issue Date: 2012
Source: Wang, Y. X., Zhang, S., Lee, J.-W., Lew, W. S., & Li, B. (2012). Influence of bias voltage on the hardness and toughness of CrAlN coatings via magnetron sputtering. Surface and Coatings Technology, 206(24), 5103-5107.
Series/Report no.: Surface and coatings technology
Abstract: Chromium aluminum nitride (CrAlN) coatings were prepared via magnetron sputtering in a mixed Ar and N2 ambient. The effect of negative bias voltage (Vb) on the microstructure was investigated using a spectrum of characterizing techniques in terms of Glancing Angle X-ray Diffractometry, Field Emission Scanning Electron Microscopy and Transmission Electron Microscopy. As Vb increased from 50 to 260 V, hardness was improved from 10 to 26 GPa. Toughness grew at the same time and maximized at around 2 MPa·m1/2 when Vb = 210 V. Simultaneous improvements in hardness and toughness were attributed to the densified microstructure with refined grains and increased compressive stress.
URI: https://hdl.handle.net/10356/96581
http://hdl.handle.net/10220/10302
ISSN: 0257-8972
DOI: http://dx.doi.org/10.1016/j.surfcoat.2012.06.041
Rights: © 2012 Elsevier B.V.
Fulltext Permission: none
Fulltext Availability: No Fulltext
Appears in Collections:MAE Journal Articles
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