Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching
Amro, Nabil A.
Date of Issue2006
School of Materials Science and Engineering
A method, combining micro-contact printing (μCP), wet chemical etching and reactive ion etching (RIE), is reported to fabricate microstructures on Si and SiOx. Positive and negative structures were generated based on different stamps used for μCP. The reproducibility of the obtained microstructures shows the methodology reported herein could be useful in Micro-Electro-Mechanical Systems (MEMS), optical and biological sensing applications.
Applied surface science
© 2006 Elsevier B.V.