Perspective of flash memory realized on vertical Si nanowires
Kwong, Dim Lee
Date of Issue2011
School of Electrical and Electronic Engineering
In this review article, the scaling challenges of planar non-volatile memory, especially the flash-types including both floating gate-based and charge-trap-based devices are firstly discussed. The promising prospects brought by 3-Dimensional (3-D) nano-wire-based cells have been presented along with various device demonstrations and discussions on vertical nano-wire platform. The memory devices with highly scaled single-crystal Si nanowire (SiNW) channel and a gate-all-around (GAA) structure achieve superior program/erase (P/E) speed, cycling and high-temperature retention characteristics as compared to the planar one and are considered as promising candidate for future ultra-high non-volatile flash memory application.
DRNTU::Engineering::Electrical and electronic engineering
© 2011 Elsevier Ltd.